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1

Study of a novel ALD process for depositing MgF2 thin films

Pilvi, Tero, Hatanpää, Timo, Puukilainen, Esa, Arstila, Kai, Bischoff, Martin, Kaiser, Ute, Kaiser, Norbert, Leskelä, Markku, Ritala, Mikko

Journal:

Journal of Materials Chemistry

Year:

2007

Language:

english

File:

PDF, 438 KB

english, 2007

2

Atomic layer deposition of Ge2Sb2Te5 thin films

Mikko Ritala, Viljami Pore, Timo Hatanpää, Mikko Heikkilä, Markku Leskelä, Kenichiro Mizohata, Alejandro Schrott, Simone Raoux, Stephen M. Rossnagel

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 623 KB

english, 2009

3

Cycloheptatrienyl-Cyclopentadienyl Heteroleptic Precursors for Atomic Layer Deposition of Group 4 Oxide Thin Films

Niinistö, Jaakko, Hatanpää, Timo, Kariniemi, Maarit, Mäntymäki, Miia, Costelle, Leila, Mizohata, Kenichiro, Kukli, Kaupo, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2012

Language:

english

File:

PDF, 1.77 MB

english, 2012

4

Precursors as enablers of ALD technology: Contributions from University of Helsinki

Hatanpää, Timo, Ritala, Mikko, Leskelä, Markku

Journal:

Coordination Chemistry Reviews

Year:

2013

Language:

english

File:

PDF, 7.81 MB

english, 2013

5

Polyelectrolyte stabilized nanodiamond dispersions

Tiainen, Tony, Myllymäki, Teemu T.T., Hatanpää, Timo, Tenhu, Heikki, Hietala, Sami

Journal:

Diamond and Related Materials

Year:

2019

Language:

english

File:

PDF, 3.57 MB

english, 2019

6

Crystal structures and thermal properties of some rare earth alkoxides with tertiary alcohols

Timo Hatanpää, Kaupo Kukli, Mikko Ritala, Markku Leskelä

Journal:

Journal of Thermal Analysis and Calorimetry

Year:

2011

Language:

english

File:

PDF, 843 KB

english, 2011

7

Properties of [Mg 2 (thd) 4 ] as a Precursor for Atomic Layer Deposition of MgO Thin Films and Crystal Structures of [Mg 2 (thd) 4 ] and [Mg(thd) 2 (EtOH) 2 ]

Hatanpää, Timo, Ihanus, Jarkko, Kansikas, Jarno, Mutikainen, Ilpo, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

1999

Language:

english

File:

PDF, 161 KB

english, 1999

8

Atomic Layer Deposition of Ferroelectric Bismuth Titanate Bi 4 Ti 3 O 12 Thin Films

Vehkamäki, Marko, Hatanpää, Timo, Kemell, Marianna, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2006

Language:

english

File:

PDF, 631 KB

english, 2006

9

Ancillary Ligand Effect on the Properties of “Mg(thd) 2 ” and Crystal Structures of [Mg(thd) 2 (ethylenediamine)] 2 , [Mg(thd) 2 (tmeda)], and [Mg(thd) 2 (trien)] 1

Hatanpää, Timo, Kansikas, Jarno, Mutikainen, Ilpo, Leskelä, Markku

Journal:

Inorganic Chemistry

Year:

2001

Language:

english

File:

PDF, 139 KB

english, 2001

10

Alkylsilyl compounds as enablers of atomic layer deposition: analysis of (Et 3 Si) 3 As through the GaAs process

Sarnet, Tiina, Hatanpää, Timo, Laitinen, Mikko, Sajavaara, Timo, Mizohata, Kenichiro, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Materials Chemistry C

Year:

2016

Language:

english

File:

PDF, 2.21 MB

english, 2016

11

Bismuth iron oxide thin films using atomic layer deposition of alternating bismuth oxide and iron oxide layers

Puttaswamy, Manjunath, Vehkamäki, Marko, Kukli, Kaupo, Dimri, Mukesh Chandra, Kemell, Marianna, Hatanpää, Timo, Heikkilä, Mikko J., Mizohata, Kenichiro, Stern, Raivo, Ritala, Mikko, Leskelä, Markku

Journal:

Thin Solid Films

Year:

2016

Language:

english

File:

PDF, 2.02 MB

english, 2016

12

Studies on Thermal Atomic Layer Deposition of Silver Thin Films

Mäkelä, Maarit, Hatanpää, Timo, Mizohata, Kenichiro, Meinander, Kristoffer, Niinistö, Jaakko, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2017

Language:

english

File:

PDF, 1.77 MB

english, 2017

13

Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films

Väyrynen, Katja, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko, Mizohata, Kenichiro, Meinander, Kristoffer, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2018

Language:

english

File:

PDF, 1.11 MB

english, 2018

14

Crystal structures and thermal properties of Ba(1,2,4-t-Bu3C5H2)2 and Sr(1,2,4-t-Bu3C5H2)2: Precursors for atomic layer deposition

Timo Hatanpää, Mikko Ritala, Markku Leskelä

Journal:

Journal of Organometallic Chemistry

Year:

2007

Language:

english

File:

PDF, 405 KB

english, 2007

15

The Use of Disaccharides in Inhibiting Enzymatic Activity Loss and Secondary Structure Changes in Freeze-Dried β-Galactosidase during Storage

Ville Petteri Heljo, Kirsi Jouppila, Timo Hatanpää, Anne M. Juppo

Journal:

Pharmaceutical Research

Year:

2011

Language:

english

File:

PDF, 516 KB

english, 2011

16

Effects of Spray Drying on Physicochemical Properties of Chitosan Acid Salts

Mirna Fernández Cervera, Jyrki Heinämäki, Nilia de la Paz, Orestes López, Sirkka Liisa Maunu, Tommi Virtanen, Timo Hatanpää, Osmo Antikainen, Antonio Nogueira, Jorge Fundora, Jouko Yliruusi

Journal:

AAPS PharmSciTech

Year:

2011

Language:

english

File:

PDF, 1014 KB

english, 2011

17

Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars

Caldwell, Joshua D., Glembocki, Orest J., Bezares, Francisco J., Kariniemi, Maarit I., Niinistö, Jaakko T., Hatanpää, Timo T., Rendell, Ronald W., Ukaegbu, Maraizu, Ritala, Mikko K., Prokes, Sharka M.

Journal:

Year:

2011

Language:

english

File:

PDF, 1.08 MB

english, 2011

18

Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

Hämäläinen, Jani, Hatanpää, Timo, Puukilainen, Esa, Sajavaara, Timo, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Materials Chemistry

Year:

2011

Language:

english

File:

PDF, 394 KB

english, 2011

19

(MeCp)Ir(CHD) and molecular oxygen as precursors in atomic layer deposition of iridium

Hämäläinen, Jani, Hatanpää, Timo, Puukilainen, Esa, Costelle, Leila, Pilvi, Tero, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Materials Chemistry

Year:

2010

Language:

english

File:

PDF, 313 KB

english, 2010

20

Ancillary Ligand Effect on the Properties of “Mg(thd) 2 ” and Crystal Structures of [Mg(thd) 2 (ethylene-diamine)] 2 , [Mg(thd) 2 (tmeda)], and [Mg(thd) 2 (trien)].

Hatanpää, Timo, Kansikas, Jarno, Mutikainen, Ilpo, Leskelä, Markku

Journal:

Inorganic Chemistry

Year:

2001

Language:

english

File:

PDF, 7 KB

english, 2001

21

Study of bismuth alkoxides as possible precursors for ALD

Hatanpää, Timo, Vehkamäki, Marko, Ritala, Mikko, Leskelä, Markku

Journal:

Dalton Transactions

Year:

2010

Language:

english

File:

PDF, 468 KB

english, 2010

22

Magnetic Properties of Polycrystalline Bismuth Ferrite Thin Films Grown by Atomic Layer Deposition

Jalkanen, Pasi, Tuboltsev, Vladimir, Marchand, Benoît, Savin, Alexander, Puttaswamy, Manjunath, Vehkamäki, Marko, Mizohata, Kenichiro, Kemell, Marianna, Hatanpää, Timo, Rogozin, Valentin, Räisänen, Jy

Journal:

The Journal of Physical Chemistry Letters

Year:

2014

Language:

english

File:

PDF, 280 KB

english, 2014

23

Atomic Layer Deposition and Characterization of Bi 2 Te 3 Thin Films

Sarnet, Tiina, Hatanpää, Timo, Puukilainen, Esa, Mattinen, Miika, Vehkamäki, Marko, Mizohata, Kenichiro, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Physical Chemistry A

Year:

2015

Language:

english

File:

PDF, 4.50 MB

english, 2015

24

(Et 3 Si) 2 Se as a precursor for atomic layer deposition: growth analysis of thermoelectric Bi 2 Se 3

Sarnet, Tiina, Hatanpää, Timo, Vehkamäki, Marko, Flyktman, Timo, Ahopelto, Jouni, Mizohata, Kenichiro, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Materials Chemistry C

Year:

2015

Language:

english

File:

PDF, 3.92 MB

english, 2015

25

Programming nanostructured soft biological surfaces by atomic layer deposition

Szilágyi, Imre Miklós, Teucher, Georg, Härkönen, Emma, Färm, Elina, Hatanpää, Timo, Nikitin, Timur, Khriachtchev, Leonid, Räsänen, Markku, Ritala, Mikko, Leskelä, Markku

Journal:

Year:

2013

Language:

english

File:

PDF, 704 KB

english, 2013

26

[OSA CLEO: Science and Innovations - Baltimore, Maryland (2011..-..)] CLEO:2011 - Laser Applications to Photonic Applications - Surface Enhanced Raman Scattering Enhancements from Silver Atomic Layer Deposition Coated Nanowire

Caldwell, Joshua D., Glembocki, Orest J., Bezares, Francisco J., Qi, Hua, Kariniemi, Maarit, Prokes, Sharka M., Niinisto, Jaako, Hatanpaa, Timo, Ritala, Mikko, Leskela, Markuu, Mastro, Michael

Year:

2011

Language:

english

File:

PDF, 298 KB

english, 2011

27

Electric and Magnetic Properties of ALD Grown BiFeO 3 Films

Marchand, Benoît, Jalkanen, Pasi, Tuboltsev, Vladimir, Vehkamäki, Marko, Puttaswamy, Manjunath, Kemell, Marianna L, Mizohata, Kenichiro, Hatanpää, Timo, Savin, Alexander Mikhailovitch, Räisänen, Jyrki

Journal:

The Journal of Physical Chemistry C

Year:

2016

Language:

english

File:

PDF, 4.07 MB

english, 2016

28

Potential gold(I) precursors evaluated for atomic layer deposition

Mäkelä, Maarit, Hatanpää, Timo, Ritala, Mikko, Leskelä, Markku, Mizohata, Kenichiro, Meinander, Kristoffer, Räisänen, Jyrki

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2017

Language:

english

File:

PDF, 2.00 MB

english, 2017

29

Atomic Layer Deposition of Crystalline MoS 2 Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth

Mattinen, Miika, Hatanpää, Timo, Sarnet, Tiina, Mizohata, Kenichiro, Meinander, Kristoffer, King, Peter J., Khriachtchev, Leonid, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Advanced Materials Interfaces

Year:

2017

Language:

english

File:

PDF, 3.11 MB

english, 2017

30

Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water

Tupala, Jere, Kemell, Marianna, Mattinen, Miika, Meinander, Kristoffer, Seppälä, Sanni, Hatanpää, Timo, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2017

Language:

english

File:

PDF, 2.69 MB

english, 2017

31

Thermal atomic layer deposition (ALD) of continuous and highly conducting gold thin films

Mäkelä, Maarit, Hatanpää, Timo, Mizohata, Kenichiro, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2017

Language:

english

File:

PDF, 2.20 MB

english, 2017

32

Titanium alkylphosphate functionalised mesoporous silica for enhanced uptake of rare-earth ions

Zhang, Wenzhong, Avdibegovic, Dzenita, Koivula, Risto, Hatanpää, Timo, Hietala, Sami, Regadío, Mercedes, Binnemans, Koen, Harjula, R

Journal:

Journal of Materials Chemistry A

Year:

2017

Language:

english

File:

PDF, 3.26 MB

english, 2017

33

Intra-Lanthanide Separation on Layered Titanium(IV) Organophosphate Materials via a Selective Transmetalation Process

Zhang, Wenzhong, Hietala, Sami, Khriachtchev, Leonid, Hatanpää, Timo, Doshi, Bhairavi, Koivula, Risto

Journal:

ACS Applied Materials & Interfaces

Year:

2018

Language:

english

File:

PDF, 2.06 MB

english, 2018

34

Atomic Layer Deposition of Intermetallic Co 3 Sn 2 and Ni 3 Sn 2 Thin Films

Väyrynen, Katja, Hatanpää, Timo, Mattinen, Miika, Mizohata, Kenichiro, Meinander, Kristoffer, Räisänen, Jyrki, Link, Joosep, Stern, Raivo, Ritala, Mikko, Leskelä, Markku

Journal:

Advanced Materials Interfaces

Year:

2018

Language:

english

File:

PDF, 1.79 MB

english, 2018

35

Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA) 2 (THF) and H 2 O

Iivonen, Tomi, Kaipio, Mikko, Hatanpää, Timo, Mizohata, Kenichiro, Meinander, Kristoffer, Räisänen, Jyrki, Kim, Jiyeon, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2019

Language:

english

File:

PDF, 1.65 MB

english, 2019

36

Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealing

Mattinen, Miika, Hatanpää, Timo, King, Peter J., Meinander, Kristoffer, Mizohata, Kenichiro, Jalkanen, Pasi, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2019

File:

PDF, 3.31 MB

2019

37

Nickel Germanide Thin Films by Atomic Layer Deposition

Väyrynen, Katja, Vihervaara, Anton, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko J., Mizohata, Kenichiro, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2019

Language:

english

File:

PDF, 497 KB

english, 2019

38

Nickel Germanide Thin Films by Atomic Layer Deposition

Väyrynen, Katja, Vihervaara, Anton, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko J., Mizohata, Kenichiro, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

Journal:

Chemistry of Materials

Year:

2019

File:

PDF, 497 KB

2019

39

Submicron fibers as a morphological improvement of amorphous zirconium oxide particles and their utilization in antimonate (Sb( v )) removal

Lönnrot, Satu, Suorsa, Valtteri, Paajanen, Johanna, Hatanpää, Timo, Ritala, Mikko, Koivula, Risto

Journal:

Year:

2019

File:

PDF, 1.63 MB

2019